Scientific-Grade Magnetron Sputtering System
Classification
Keywords
- Product Description
- Technical Indicators
- Applications
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Product Model:
MS-300
Product Overview:
The MS-300 magnetron sputtering system boasts ultra-high vacuum capabilities and precise single atomic layer deposition, allowing for flexible selection of cathode upward or downward sputtering. The equipment has three 2-inch UHV cathodes as standard. Satisfy the needs of scientific research in a laboratory, straightforward maintenance, stable operation.
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Wafer size
4 inch, downward compatible
Film-coating uniformity
±2%
Ultimate vacuum
1 × 10-8 mbar
Temperature control
RT–800°C
Number of cathodes
Three 2-inch
Power supply
DC、RF、DC Pulse Deposition accuracy
0.1 nm
Area
L×W×H: 2 m × 1 m × 2 m Optional
Cryopump, automatic transfer, reactive sputtering, film thickness gauge, process menu, plasma analyzer, etc.
Scientific-Grade Magnetron Sputtering System
Classification
Keywords
Intention Table
Application Industry
Provide reliable equipment for China's IC manufacturing, empowering technological innovation through precision measurement!
Contact Information
Business Inquiries:+86-532-89267428/13335086685Manager Yao
Switchboard:+86-532-89269848
Company Address: 393 Songling Road, Laoshan District, Qingdao, Shandong Province, China
WeChat Official Account
Bilibili Account