Zhizhen Precision Instrument (Qingdao) Co., Ltd.

Home

Wafer-Scale Atomic Force Microscopy

+86-13335086685 Yao Jingli

immediate consultation

Industry Applications

Classification

Nanomorphology Characterization Instruments

Keywords

Product Description
Technical Indicators
Applications

Product Model:

Wafer Mapper-M

Product Overview:

The microcantilever probe structure enables the three-dimensional characterization of solid materials such as conductors, semiconductors and insulators, as well as characterization of the morphology of large wafer-scale samples. In combination with optical imaging, the motorized sample positioning stage can achieve 1 µm positioning accuracy over a 300 × 300 mm area, with fully automatic probe approximation and scanning parameter adjustment.
1. Advanced functions: Measurements of Young’s modulus, adhesion, magnetic domain, surface

2. Suitable environment: Compatible with petri dishes, heating stages and other accessories, and supporting measurements under liquids, at high temperatures, etc.

3. Intelligent probe feeding: Intelligent one-button probe feeding is achieved with a piezoelectric tube scanner.

4. Adaptive size: 12-inch wafers, downward compatible with various wafer sizes;

● XY-direction noise level: 0.2 nm for closed cycle, and 0.02 nm for open cycle

● Z-direction noise level: 0.06 nm for closed cycle, and 0.03 nm for open cycle

● Nonlinearity: XY-direction 0.15%, Z-direction 1%

● Scanning mode: Scan with all probes in the X, Y, Z directions, with the sample remaining stationary during the scanning process

● Scanning range: 90 μm × 90 μm × 9 μm

● Scanning rate: 0.1 Hz–30 Hz

● Image sampling point: 32 × 32–4,000 × 4,000

● Sample size: 12-inch wafers; downward compatible with 8-inch, 6-inch and 4-inch wafers and fragments;

● Working mode: contact, tapping and non-contact

● Suitable environment: air and liquid phase

● Multi-functional measurements: electrostatic force microscopy (EFM), scanning Kelvin probe force microscopy (KPFM), piezoelectric force microscopy (PFM), conductive atomic force microscopy (C-AFM), scanning capacitance force microscopy (SCFM), magnetic force microscopy (MFM), lateral force microscopy (LFM), nano-etching/processing, single-point force spectral curve, and force modulation mode

● Optional: fully automatic loading and unloading

● Fully automatic probe approximation system: travel of 35 mm, and stepping accuracy of 50 nm
Tap mode

Morphological image of globulin sample

To True Precision:

international famous brand B:

Instances:

Potential of the Au-Ti strip electrode sheet

Scanning mode: KPFM (lift-mode)

Scanning range: 18μm × 18μm

Electrostatic force of the Au-Ti strip electrode sheet

Scanning mode: EFM (lift mode)

Scanning range: 18μm × 18μm

Magnetic domains in Fe-Ni thin films

Scanning mode: MFM (lift-mode)

Scanning range: 14μm × 14μm

PbTiO3-piezoelectric corresponding vertical amplitude image

Scanning mode: PFM (contact-mode)

Scanning range: 20μm × 20μm

Morphology of polystyrene spheres

Scanning mode: tapping

Scanning range: 10μm × 10μm

Morphological image of SiC whisker