Wafer-level Atomic Force Microscope
Classification
Keywords
- Product Description
- Technical Indicators
- Applications
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Product Model:
AtomMax
Product Overview:
The microcantilever probe structure can be used to characterize the three-dimensional appearance of solid materials such as conductors, semiconductors, and insulators, and can achieve the morphology characterization of large samples at the wafer level. The electric sample positioning stage, combined with optical images, can achieve a positioning accuracy of 1 μm in a 200×200 mm area. The optical structure is integrated with the scanning head, making operation convenient.
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Equipment Performance
Sample size 8-inch wafer and backward compatible Scanning range 100 μm×100 μm×10 μm Scanning angle 0-360° Z-direction linearity 0.2% Noise level in the Z direction 0.06 nm Image sampling point 32×32 - 4096×4096 Working mode Contact mode, tap mode, phase imaging mode, lift mode, multi-directional scanning mode Multifunctional measurement Electrostatic force microscope (EFM), scanning Kelvin microscope (KFM), piezoelectric force microscope (PFM), magnetic force microscope (MFM);
optional: Conductive atomic force microscope (C-AFM)
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- CZTSSe film
- Scanning mode: Lift Mode(KPFM)
- Scanning range: 12 um x 12 um
- Electrostatic force of the Au-Ti strip electrode sheet
- Scanning mode: EFM (lift mode)
- Scanning range: 18μm * 18μm
- Magnetic domains in Fe-Ni thin films
- Scanning mode: MFM (lift-mode)
- Scanning range: 14μm * 14μm
- PbTiO3-piezoelectric corresponding vertical amplitude image
- Scanning mode: PFM (contact-mode)
- Scanning range: 20μm * 20μm
- Co/Pt Thin Film
- Scanning Mode: Magnetic Force Microscopy (MFM)
- Scanning Range: 25 μm * 25 μm
Wafer-level Atomic Force Microscope
Classification
Keywords
Intention Table
Application Industry
Provide reliable equipment for advanced manufacturing, empowering technological innovation through precision measurement!!
Contact Information
Business Inquiries:+86-532-89267428/13335086685Manager Yao
Switchboard:+86-532-89269848
Company Address: 393 Songling Road, Laoshan District, Qingdao, Shandong Province, China
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Bilibili Account